Self aligning lift mechanism

Details Self aligning lift mechanism Self aligning lift mechanism

1996-10-25

1999-09-14

Breneman, Bruce

Coating apparatus

Gas or vapor deposition

Work support

187267, 187268, 1984688, 198617, C23C 1600, B66B 902, B65G 2900, B65G 4700

Patent

active

059517760

ABSTRACT:
A particular configuration of a compact self-aligning lift mechanism is provided for lifting the stem of a pedestal in a processing chamber while minimizing process anomalies due to geometric misalignment and binding of moving pieces. The force associated with supporting a stem in a processing chamber is routed through a first arm through a base portion of a carrier bracket where it engages a linear bearing such that the truck and track of the linear bearing absorb all forces riot aligned with the bearing. A second arm extending from the base portion, for example through a set of slots adjacent to the bearing track support member, is attached to a lift mechanism which can oppose the force from the pedestal stem such that the displacements of the first and second arms are predictable based on the force on that arm. A compliant nut is used so that the drive screw can be somewhat misaligned with the linear bearing track without causing binding, misalignment, or non-repeatability of substrate positioning during processing.

REFERENCES:
patent: 3831460 (1974-08-01), Linley
patent: 3977269 (1976-08-01), Linley
patent: 4434677 (1984-03-01), Linley
patent: 4687542 (1987-08-01), Davis et al.
patent: 4781511 (1988-11-01), Harada et al.
patent: 4909185 (1990-03-01), Aldridge et al.
patent: 5055036 (1991-10-01), Asano et al.
patent: 5097794 (1992-03-01), Mahler et al.
patent: 5133285 (1992-07-01), Mahler et al.
patent: 5354382 (1994-10-01), Sung et al.
patent: 5421894 (1995-06-01), Lie et al.
patent: 5458688 (1995-10-01), Watanabe
patent: 5556476 (1996-09-01), Lei et al.
patent: 5558717 (1996-09-01), Zhao et al.
patent: 5695568 (1997-12-01), Sinha et al.
patent: 5772773 (1998-06-01), Wytman

Affiliated with

Also associated with

Rating

Self aligning lift mechanism does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Self aligning lift mechanism, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Self aligning lift mechanism will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1506859