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Device and method for handling substrates by means of a...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Device for carrying out a surface treatment of substrates...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Device for coating objects

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Device for forming a deposited film

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Device for forming deposited film

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Device for processing semiconductor wafers

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Device for producing thin films of mixed metal oxides from organ

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Diamond synthesizing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Diffusion equipment

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Diffusion system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Double chamber vacuum apparatus for thin layer deposition

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Drive mechanism for a vacuum treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Dry-processing apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Dual degas/cool loadlock cluster tool

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Dual substrate loadlock process equipment

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Effusion cell assembly for epitaxial apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Electron beam physical vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Enhanced vertical thermal reactor system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Enhanced vertical thermal reactor system

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Evaporator

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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