Drive mechanism for a vacuum treatment apparatus

Details Drive mechanism for a vacuum treatment apparatus Drive mechanism for a vacuum treatment apparatus

2006-12-26

2006-12-26

Hassanzadeh, Parviz (Department: 1763)

Coating apparatus

Gas or vapor deposition

Multizone chamber

C118S728000, C118S729000, C118S730000, C156S345310, C156S345320, C156S345510, C156S345520, C156S345530, C156S345540, C156S345550, C204S298230, C204S298250, C204S298260, C204S298270, C204S298280, C414S217000

Reexamination Certificate

active

07153367

ABSTRACT:
The invention relates to a drive mechanism for a vacuum treatment apparatus by which substrate holders can be transported around an axis (A—A) from an entrance airlock to an exit airlock. A stationary supporting column (1) is disposed in the center and on it a rotatory drive chamber (6) is borne which has control rods (9) for a rotation and a radial displacement of the substrate holders. In the rotatory drive chamber (6), a motor (4) and rotatory displacement drives for the control rods (9) are arranged on the supporting column (1), the control rods being in active connection each with a corresponding substrate holder. To solve the problem of carrying substrates through the vacuum treatment apparatus, even substrates of great area, smoothly, at a slight angle to the vertical, not fastened to the substrate holders, it is provided that a) the motor (4) is joined to a stationary bearing carrier (5) in which a rotatory star-shaped array of cantilevers (14) is mounted, b) the cantilevers (14) are articulated at one end to bell-crank levers (16), each of which has a pivot pin (17), c) the other end of each of the bell-crank levers (16) is articulated to one of the control rods (9), and that d) the pivot pins (17) of the bell-crank levers (16) are guided in a first stationary radial cam (11) whose shape determines the radial movements of the control rods (9). A periodic, variable superposition of the radial movements is performed by variable tangential movements produced by a second stationary radial cam (12) with a bell-crank lever which is joined by a link (24) to the drive chamber (6).

REFERENCES:
patent: 4675096 (1987-06-01), Tateishi et al.
patent: 5407314 (1995-04-01), Kempf et al.
patent: 5709785 (1998-01-01), LeBlanc, III et al.
patent: 5993556 (1999-11-01), Maidhof et al.
patent: 0 136 562 (1985-04-01), None
patent: 06-322542 (1994-11-01), None
patent: 2002-200419 (2002-07-01), None
Patent Abstracts of Japan, Nov. 6, 2002.
Patent Abstracts of Japan, Mar. 31, 1995.

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