Effusion cell assembly for epitaxial apparatus

Details Effusion cell assembly for epitaxial apparatus Effusion cell assembly for epitaxial apparatus

1998-08-28

2000-05-16

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Multizone chamber

118726, C23C 1600

Patent

active

060632011

ABSTRACT:
An effusion cell assembly for epitaxial apparatus is disclosed. The assembly includes an effusion cell incluing a growing material, a heater for supplying heats with the effusion cell to effuse the growing material, a supporting plate for supporting the heater, a bolt having one end connected to the supporting plate, a cell flange coupled to a lower flange of an adaptor for supporting the cell assembly, bellows fixed between the supporting plate and the cell flange including the bolt, and a control nut for expanding and contracting the bellows so as to separate only the cell assembly from a vacuum chamber with entire vacuum maintained in the vacuum chamber and local vacuum released in the cell assembly. The epitaxial apparatus further includes a control valve located between an entrance flange of the vacuum chamber and an upper adaptor flange of the adaptor for introducing and maintaining vacuum in the vacuum chamber.

REFERENCES:
patent: 4518846 (1985-05-01), Freeouf
patent: 5041719 (1991-08-01), Harris
patent: 5253266 (1993-10-01), Knodle
patent: 5827371 (1998-10-01), Colombo

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