Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate
2005-09-27
2005-09-27
Mills, Gregory (Department: 1763)
Coating apparatus
Gas or vapor deposition
Multizone chamber
C118S724000, C414S217000
Reexamination Certificate
active
06949143
ABSTRACT:
One embodiment relates to a loadlock having a first support structure therein to support one unprocessed substrate and a second support structure therein to support one processed substrate. The first support structure is located above the second support structure. The loadlock includes an elevator to control the vertical position of the support structures. The loadlock also includes a first aperture to permit insertion of an unprocessed substrate into the loadlock and removal of a processed substrate from the loadlock, as wall as a second aperture to permit removal of an unprocessed substrate from the loadlock and insertion of a processed substrate into the loadlock. A cooling plate is also located in the loadlock. The cooling plate includes a surface adapted to support a processed substrate thereon. A heating device may be located in the loadlock above the first support structure.
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Dec
Blonigan Wendell T.
Hosokawa Akihiro
Kurita Shinichi
Applied Materials Inc.
MacArthur Sylvia R
Mills Gregory
Moser Patterson & Sheridan LLP
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