Device for coating objects

Details Device for coating objects Device for coating objects

1979-10-31

1981-10-13

Smith, Ronald H.

Coating apparatus

Gas or vapor deposition

Multizone chamber

118730, 118733, 34242, C23C 1300

Patent

active

042941946

ABSTRACT:
A device is disclosed for the formation of electric capacitor metal coatings and glow polymerization coatings to be applied in a vacuum installation in separate vacuum chambers. The air locks which are required between these vacuum chambers are designed to be particularly space saving by providing a transport device which consists of a drum which can only be driven in one direction and wherein the air lock which precedes the vacuum chamber subject to the lower residual gas pressure considered in the flow direction has longer diffusion paths between the vacuum chambers.

REFERENCES:
patent: 2740928 (1956-04-01), Ward
patent: 3023727 (1962-03-01), Theodosean et al.
patent: 3043728 (1962-07-01), Stauffer
patent: 3110620 (1963-11-01), Bertelsen
patent: 3183563 (1965-05-01), Smith
patent: 3502051 (1970-03-01), Adams

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