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Damascene gate electrode method for fabricating field effect...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene gate multi-mesa MOSFET

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene gate process

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene gate process with sacrificial oxide in...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Damascene gate semiconductor processing with local thinning...

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Damascene interconnect structure and fabrication method...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene interconnect structures including etchback for...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Damascene interconnection having porous low k layer with a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene isolation of CMOS transistors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene local interconnect process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene manufacturing process capable of forming borderless vi

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene metal interconnects using highly directional...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene method capable of avoiding copper extrusion

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene method employing composite etch stop layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Damascene method employing multi-layer etch stop layer

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Damascene method for source drain definition of silicon on insul

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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Damascene NiSi metal gate high-k transistor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene NiSi metal gate high-k transistor

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Damascene NVRAM cell and method of manufacture

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene pattering of SOI MOS transistors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
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