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Damascene patterning of barrier layer metal for C4 solder bumps

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene process at semiconductor substrate level

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Damascene process capable of avoiding via resist poisoning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene process for a T-shaped gate electrode

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having schottky gate
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Damascene process for carbon memory element with MIIM diode

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene process for carbon memory element with MIIM diode

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene process for fabricating interconnect layers in an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Damascene process for forming coplanar top surface of copper con

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene process for forming ferroelectric capacitors

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene process for forming ultra-shallow source/drain extensi

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Damascene process for MOSFET fabrication

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Damascene process for reduced feature size

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Damascene process for use in fabricating semiconductor...

Semiconductor device manufacturing: process – Semiconductor substrate dicing
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Damascene process to eliminate copper defects during...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene process with anti-reflection coating

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Damascene processes for forming conductive structures

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene processing using a silicon carbide hard mask

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Damascene resistor and method for measuring the width of same

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Diffusing a dopant
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