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Use of a plasma source to form a layer during the formation of a

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
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Use of a plasma source to form a layer during the formation...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Use of a plasma source to form a layer during the formation...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of a plasma source to form a layer during the formation...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Use of a polish stop layer in the formation of metal structures

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Use of a rapid thermal anneal process to control drive current

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Use of a reference fiducial on a semiconductor package to...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
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Use of a sacrificial layer to facilitate metallization for...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Use of a selective hard mask for the integration of double...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Use of a silicon carbide adhesion promoter layer to enhance...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Use of a single mask during the formation of a transistor's...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Use of a thin nitride spacer in a split gate embedded analog...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Use of a U-groove as an alternative to using a V-groove for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of a wet etch dip step used as part of a self-aligned...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Use of ammonia for etching organic low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of ammonia for etching organic low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of amorphous carbon as a removable ARC material for dual...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Use of amorphous carbon for gate patterning

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Use of amorphous carbon hard mask for gate patterning to...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Use of an asymmetric waveform to control ion bombardment during

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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