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Fabrication of a shallow trench isolation by plasma oxidation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Fabrication of a SiC semiconductor device comprising a pn juncti

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Fabrication of a via plug having high aspect ratio with a diffus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fabrication of a waveguide taper through ion implantation

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
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Fabrication of a wide metal silicide on a narrow polysilicon...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Fabrication of a wide metal silicide on a narrow polysilicon...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Fabrication of abrupt ultra-shallow junctions

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Self-aligned
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Fabrication of abrupt ultra-shallow junctions

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Fabrication of abrupt ultra-shallow junctions using angled...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of active areas of different natures directly...

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates
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Fabrication of advanced silicon-based MEMS devices

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Fabrication of aligned nanowire lattices

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Fabrication of aligned nanowire lattices

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
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Fabrication of an EEPROM cell with emitter-polysilicon...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of an EEPROM cell with SiGe source/drain regions

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of an integrated circuit package

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Making plural separate devices
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Fabrication of an OTP-EPROM having reduced leakage current

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Fabrication of array pH sensitive EGFET and its readout circuit

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
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Fabrication of B-doped silicon film by LPCVD method using...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Fabrication of bipolar/CMOS integrated circuits

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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