Fabrication of advanced silicon-based MEMS devices

Details Fabrication of advanced silicon-based MEMS devices Fabrication of advanced silicon-based MEMS devices

2007-01-09

2007-01-09

Sarkar, Asok Kumar (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S048000

Reexamination Certificate

active

11242960

ABSTRACT:
A micro-electro-mechanical (MEM) device and an electronic device are fabricated on a common substrate by fabricating the electronic device comprising a plurality of electronic components on the common substrate, depositing a thermally stable interconnect layer on the electronic device, encapsulating the interconnected electronic device with a protective layer, forming a sacrificial layer over the protective layer, opening holes in the sacrificial layer and the protective layer to allow the connection of the MEM device to the electronic device, fabricating the MEM device by depositing and patterning at least one layer of amorphous silicon, and removing at least a portion of the sacrificial layer. In this way, the MEM device can be fabricated after the electronic device on the same substrate.

REFERENCES:
patent: 5090254 (1992-02-01), Guckel et al.
patent: 5326726 (1994-07-01), Tsang et al.
patent: 5342652 (1994-08-01), Foster et al.
patent: 5902650 (1999-05-01), Feng et al.
patent: 6063703 (2000-05-01), Shinriki et al.
patent: 6081021 (2000-06-01), Gambino et al.
patent: 6635528 (2003-10-01), Gilbert et al.

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