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Reduced deformation of micromechanical devices through...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Reflective spatial light modulator mirror device...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Regeneration of Fischer-Tropsch catalysts by using synthesis gas

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Release etch method for micromachined sensors

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Resonant MEMS device that detects photons, particles and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Robust substrate-based micromachining techniques and their...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Sacrificial layer technique to make gaps in MEMS applications

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Self-aligned coating on released MEMS

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Self-assemblying micro-mechanical device

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor apparatus and method for manufacturing the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor device and method of fabricating the same

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor device with optical sensor and method of...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor dynamic quantity-sensor and method of...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor dynamic sensor, and methods of transport and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor element holding apparatus and semiconductor...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor integrated capacitive acceleration sensor and...

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor mechanical sensor

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Physical stress responsive
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Semiconductor methods and structures

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Semiconductor packages

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Semiconductor physical quantity sensor and method for...

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