Reduced deformation of micromechanical devices through...
Reflective spatial light modulator mirror device...
Regeneration of Fischer-Tropsch catalysts by using synthesis gas
Release etch method for micromachined sensors
Resonant MEMS device that detects photons, particles and...
Robust substrate-based micromachining techniques and their...
Sacrificial layer technique to make gaps in MEMS applications
Self-aligned coating on released MEMS
Self-assemblying micro-mechanical device
Semiconductor apparatus and method for manufacturing the same
Semiconductor device and method of fabricating the same
Semiconductor device with optical sensor and method of...
Semiconductor dynamic quantity-sensor and method of...
Semiconductor dynamic sensor, and methods of transport and...
Semiconductor element holding apparatus and semiconductor...
Semiconductor integrated capacitive acceleration sensor and...
Semiconductor mechanical sensor
Semiconductor methods and structures
Semiconductor packages
Semiconductor physical quantity sensor and method for...