Capacitive pick-off and electrostatic rebalance...
Carbon nanotube memory cell for integrated circuit structure...
Charge transfer device and solid image pickup apparatus...
Cloverleaf microgyroscope with through-wafer interconnects...
CMOS-MEMS process
Combined micro-electro-mechanical systems device and...
Conductive plane beneath suspended microstructure
Contactless acceleration switch
Deep groove structure for semiconductors
Devices having vertically-disposed nanofabric articles and...
Die-level opto-electronic device and method of making same
Double-sided etching method using embedded alignment mark
Double-sided trench fill for electrical isolation of...
Dual metal silicides for lowering contact resistance
Electrical through-plating of semiconductor chips
Electrode design and positioning for controlled movement of...
Electrode design and positioning for controlled movement of...
Electromechanical memory array using nanotube ribbons and...
Electronic device including MEMS devices and holed...
Electronic devices including micromechanical switches