Capacitive pick-off and electrostatic rebalance...

Details Capacitive pick-off and electrostatic rebalance... Capacitive pick-off and electrostatic rebalance...

2006-04-04

2006-04-04

Smith, Bradley K. (Department: 2891)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S048000, C257S419000, C073S514230, C073S514320, C073S514370

Reexamination Certificate

active

07022543

ABSTRACT:
A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a an elongated sensing element of substantially uniform thickness suspended for motion relative to a rotational axis offset between first and second ends thereof such that a first portion of the sensing element between the rotational axis and the first end is longer than a shorter second portion between the rotational axis and the second end; a stationary silicon substrate spaced away from the sensing element; a capacitor formed by a surface of the substrate and each of the first and second portions of the sensing element; and a valley formed in the substrate surface opposite from the first longer portion of the sensing element and spaced away from the rotational axis a distance substantially the same as the distance between the rotational axis and the second end of the sensing element.

REFERENCES:
patent: 4736629 (1988-04-01), Cole
patent: 4945765 (1990-08-01), Roszhart
patent: 5006487 (1991-04-01), Stokes
patent: 5659195 (1997-08-01), Kaiser et al.
patent: 5905203 (1999-05-01), Flach et al.
patent: 6040611 (2000-03-01), De Los Santos et al.
patent: 6230567 (2001-05-01), Greiff
patent: 6631641 (2003-10-01), Schalk et al.
patent: 6701779 (2004-03-01), Volant et al.
patent: 6705166 (2004-03-01), Leonardson
patent: 6841992 (2005-01-01), Yue et al.
patent: 2004/0160232 (2004-08-01), Yue et al.
patent: 195 41 388 (1997-05-01), None

Affiliated with

Also associated with

Rating

Capacitive pick-off and electrostatic rebalance... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Capacitive pick-off and electrostatic rebalance..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Capacitive pick-off and electrostatic rebalance... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3541097