Deposition of nanoporous silica films using a closed cup coater

Deposition of phosphosilicate glass film

Deposition of silicon dioxide and silicon oxynitride using bis(t

Deposition of silicon layers for active matrix liquid...

Deposition of stable dielectric films

Deposition of super thin PECVD SiO.sub.2 in multiple deposition

Deposition of tensile and compressive stressed materials

Deposition of ZrA1ON films

Deposition process for forming void-free dielectric layer

Deposition profile modification through process chemistry

Deuterium incorporated nitride

Develop processing method of a resist surface of a substrate...

Develop processing method of a resist surface on a substrate...

Device and method for processing substrate

Device fabrication involving surface planarization

Device having dual etch stop liner and reformed silicide...

Devices and methods of preventing plasma charging damage in...

Dielectric coatings and use in capacitors

Dielectric cure for reducing oxygen vacancies

Dielectric film