Dielectric coatings and use in capacitors

Details Dielectric coatings and use in capacitors Dielectric coatings and use in capacitors

2006-02-07

2011-10-04

Roman, Angel (Department: 2812)

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

C438S778000, C438S787000, C438S789000, C257SE21487

Reexamination Certificate

active

08030219

ABSTRACT:
A coated substrate product is described comprising a substrate and a dielectric coating material comprising carbon, hydrogen, silicon, and oxygen. According to the method, the substrate is processed by plasma cleaning the surface and then depositing a dielectric coating by a suitable plasma process. The coating may contain one or more layers. The substrate may be a rigid material or a thin film or foil. The coated products of this invention have superior dielectric material properties and utility as substrates for the manufacture of rolled or parallel plate capacitors with high energy densities.

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