Oxygen plasma treatment for enhanced HDP-CVD gapfill

Oxynitride GTE dielectrics using NH.sub.3 gas

Ozone treatment method and ozone treatment apparatus

Ozone-enhanced oxidation for high-k dielectric semiconductor...

Ozone-teos method for forming with attenuated surface...

Particle reduction in PECVD processes for depositing low-k...

Passivation integrity improvements

Passivation layer for a circuit device and method of...

Passivation layer of semiconductor device and method for forming

Passivation of aluminum nitride substrates

Passivation of copper with ammonia-free silicon nitride and appl

Passivation of copper with ammonia-free silicon nitride and...

Passivation of oxide-compound semiconductor interfaces

Passive elements, articles, packages, semiconductor...

Pattern and fabricating method therefor, device and...

Pattern and its forming method of liquid crystal display device

Pattern forming method for flattening an organic film for a...

Patterned ceramic films and method for producing the same

Patterned functionalized silicon surfaces

Patterned plasma nitridation for selective epi and silicide...