Multi-layer dielectric containing diffusion barrier material

Multi-layer wafer fabrication

Multi-step process for forming high-aspect-ratio holes for...

Nitridation for split gate multiple voltage devices

Non-shrinkable passivation scheme for metal em improvement

Optical marker layer for etch endpoint determination

Optimal operation of conformal silica deposition reactors

Oxidation of silicon using fluorine implant

Oxide/nitride stacked gate dielectric and associated methods

Oxide/organic polymer multilayer thin films deposited by...

Pattern and fabricating method therefor, device and...

PECVD oxide-nitride and oxide-silicon stacks for 3D memory...

Plasma processes for depositing low dielectric constant films

Pre-metal dielectric rapid thermal processing for sub-micron...

Process for applying a molten droplet coating for integrated...

Process for atomic layer deposition

Process for coating an integrated circuit device with a molten s

Process for fabricating a semiconductor structure having a self-

Process for inhibiting crack formation in low dielectric...

Process for planarizing surface of a semiconductor device