Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate
2007-09-26
2010-12-14
Garber, Charles D (Department: 2812)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Multiple layers
C257SE21409, C257SE21171
Reexamination Certificate
active
07851380
ABSTRACT:
The present invention relates to a process of making thin film electronic components and devices, such as thin film transistors, environmental barrier layers, capacitors, insulators and bus lines, where most or all of the layers are made by an atmospheric atomic layer deposition process.
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Cowdery-Corvan Peter J.
Ellinger Carolyn R.
Freeman Diane C.
Irving Lyn M.
Levy David H.
Eastman Kodak Company
Garber Charles D
Isaac Stanetta D
Konkol Chris P.
Tucker J. Lanny
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