Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Patent
1995-10-27
1999-03-02
Graybill, David
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
Multiple layers
438763, 438782, 438785, 438780, H01L 2156
Patent
active
058770933
ABSTRACT:
Disclosed is a method of forming a primer coating and an opaque coating on an integrated circuit or multichip module. First a primer coating composition is applied to a surface of the integrated circuit device or multichip module to form a primer coating that increases the resistance of the surface to thermal and mechanical damage that may occur as a result of the application of the opaque coating. An opaque coating composition is then heated to a molten state and the molten opaque coating composition is applied over the primer coating to form an opaque coating that overlies active circuitry on the surface, to prevent optical and radiation based inspection and reverse engineering of the active circuitry.
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Anderson Curtis W.
Heffner Kenneth H.
Graybill David
Greenstien Robert E.
Honeywell Inc.
Rendos Thomas A.
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