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Topography directed patterning

Semiconductor device manufacturing: process – Chemical etching
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Toxic residual gas removal by non-reactive ion sputtering

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Transistor assembly and method of its fabrication

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Transistor fabrication methods using reduced width sidewall...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Transistor with independent gate structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Transistors with substitutionally formed gate structures and met

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Treatment for corrosion in substrate processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Treatment for film surface to reduce photo footing

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
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Treatment method for surface of substrate, method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Treatment method of cleaved film for the manufacture of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Treatment method of semiconductor, method for manufacturing...

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Treatment of a surface having an exposed silicon/silica interfac

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Treatment of a surface having exposed silica

Semiconductor device manufacturing: process – Chemical etching
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Treatment of dielectric material to enhance etch rate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Treatment of exposed silicon and silicon dioxide surfaces

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Treatment of semiconductor wafers

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Trench etch process for low-k dielectrics

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Trench forming process and integrated circuit device including a

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Trench growth techniques using selective epitaxy

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Trench photolithography rework for removal of photoresist...

Semiconductor device manufacturing: process – Chemical etching
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