Mechanism for etching a silicon layer in a plasma processing...

Mechano-chemical polishing of crystals and epitaxial layers...

Membrane 3D IC fabrication

Memory device having isolation trenches with different...

MEMS device integrated chip package, and method of making same

Metal catalyst technique for texturing silicon solar cells

Metal chemical polishing process for minimizing dishing...

Metal etch process selective to metallic insulating materials

Metal etching process and rework method thereof

Metal film etching method

Metal film forming method

Metal gate with CVD amorphous silicon layer and a barrier...

Metal gate with CVD amorphous silicon layer and silicide for...

Metal gate with PVD amorphous silicon and silicide for CMOS...

Metal selective polymer removal

Metal silicide etch resistant plasma etch method

Metal structure with sidewall passivation and method

Metal surface and film protection method to prolong Q-time...

Metal-assisted chemical etch porous silicon formation method

Metal-assisted chemical etch to produce porous group III-V...