Metal selective polymer removal

Details Metal selective polymer removal Metal selective polymer removal

1996-10-31

1998-12-22

Breneman, R. Bruce

Semiconductor device manufacturing: process

Chemical etching

Vapor phase etching

438704, 438735, 134 13, H01L 21302

Patent

active

RE0360066

ABSTRACT:
A metal selective polymer removal process is disclosed which prevents metal lift-off for use especially suited for ULSI fabrication.

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