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Highly selective chemical dry etching of silicon nitride over si

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Highly selective dry etching process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Highly selective nitride etching employing surface mediated...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Highly selective oxide etch process using hexafluorobutadiene

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Highly-selective metal etchants

Semiconductor device manufacturing: process – Chemical etching – Liquid phase etching
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Hole pattern forming method and semiconductor device...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Host and ancillary tool interface methodology for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Host and ancillary tool interface methodology for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hot plate annealing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hybrid stack method for patterning source/drain areas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrocarbon gases for anisotropic etching of metal-containing la

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrocarbon-enhanced dry stripping of photoresist

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen and oxygen based photoresist removal process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen ashing enhanced with water vapor and diluent gas

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen fluoride vapor phase selective etching method for fabri

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen free integration of high-k gate dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Hydrogen plasma photoresist strip and polymeric residue...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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