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Method for reducing dimensions between patterns on a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing foreign material concentrations in etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing particles deposited onto a semiconductor waf

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing plasma charging damages

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing precipitate defects using a plasma treatment

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing reactive ion etching (RIE) lag in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing reflectivity of a metal layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing resist height erosion in a gate etch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing size of semiconductor unit in packaging...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reducing topography dependent charging effects in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for reduction of polycide residues

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for release of surface micromachined structures in an...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removal of hydrocarbon contamination on gate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removal of pattern resist over patterned metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removal of pattern resist over patterned metal...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removal of photoresist residue after dry metal etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removing conductive residue

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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METHOD FOR REMOVING CONTAMINANT COMPOUNDS RESPECTIVELY...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removing contaminants from integrated circuits

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for removing etching residues and contaminants

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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