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Method for improved sputter etch processing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for improving the stability of amorphous silicon

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for improving trench isolation

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for improving uniformity in batch processing of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for in situ removal of a dielectric antireflective...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for in-situ refurbishing a ceramic substrate holder

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for in-situ removal of side walls in MOM capacitor...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for in-situ removing photoresist material

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for integrated circuit fabrication using pitch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for integrated circuit fabrication using pitch...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for integrating NVM circuitry with logic circuitry

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for interconnecting magnetoresistive memory bits

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for isolating semiconductor devices

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for large-scale fabrication of atomic-scale...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for lateral etching with holes for making...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for line etch roughness (LER) reduction for low-k...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for making a dual damascene interconnect using a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for making a micro-fluid ejection device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for making a micro-fluid ejection device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for making a micromachine

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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