LandOfFree - US Patents - Listing for Semiconductor device manufacturing: process,Chemical etching,Vapor phase etching

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a gate of a high integration...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a gate structure used in borderless contact e

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a hard mask for gate electrode patterning...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a hard mask of half critical dimension

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a high aspect ratio borderless contact hole

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a micro pattern

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a passivation layer with planarization

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a self-aligned contact

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a semiconductor device using a mask...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a shallow trench with tapered profile and rou

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a silicon oxynitride layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a spacer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a square oxide structure or a square...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a storage node of a capacitor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a thin-film transistor

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a thin-film, electrically blowable fuse...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming a vertical edge submicron through-hole...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming an air gap as low dielectric constant...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching

Method for forming an inter-layer dielectric layer