Silicon precursors for deep trench silicon etch processes

Silicon recess improvement through improved post implant...

Silicon sidewall etching

Silicon trench etch using silicon-containing precursors to...

Silylation process for forming contacts

Simplified dual damascene process

Simplified pitch doubling process flow

Simplified pitch doubling process flow

Simplified sidewall formation for sidewall patterning of sub...

Single and multilevel rework

Single step etched moat

Single wafer in-situ dry clean and seasoning for plasma...

Single-layer-electrode type charge coupled device having double

Site-specific method for large area uniform thickness plan...

Slotted electrostatic shield modification for improved etch...

Small scale wires with microelectromechanical devices

Solid state imaging device, manufacturing method of the...

Solid state plasma antenna

Solid state thermal switch

Solid-state imaging device with reduced smear