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FBI etching enhanced with 1,2 di-iodo-ethane

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Ferroelectric capacitor devices and a method for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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FIB/RIE method for in-line circuit modification of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Field effect transistor device including an array of channel...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Film forming method and film formed by the method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Film forming method and film forming apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Films doped with carbon for use in integrated circuit technology

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fine line printing by trimming the sidewalls of...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fine pattern formation method and semiconductor device or...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fine patterning method for semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Flash step preparatory to dielectric etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fluorine-doped silicate glass hard mask to improve metal line et

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Fluorocarbon polymer layer deposition predominant pre-etch plasm

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Focused ion beam etching of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Focused ion beam etching of copper with variable pixel spacing

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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For mol integration

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Formation of a bottle shaped trench

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Formation of a slot in a silicon substrate

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Formation of controlled sublithographic structures

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Formation of diamond particle interconnects

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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