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Plasma enhanced chemical vapor reactor with shaped electrodes

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma etching method using polymer deposition and method of...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma etching of dielectric layer with etch profile control

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma treatment and repair processes for reducing sidewall...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Plasma treatment method for PECVD silicon nitride films for impr

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Polishing polymer surfaces on non-porous CMP pads

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Polymer spacers for creating small geometry space and method...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Positive tone bi-layer method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Positive tone bi-layer method

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Post etch clean sequence for making a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Post ion implant photoresist strip using a pattern fill and...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Pre STI-CMP planarization scheme

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Preventing gate oxice thinning effect in a recess LOCOS process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Printing plates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Probe sheet and method of manufacturing the same

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Process and apparatus for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Process and device for the deposition of an at least...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Process flow for dual damescene interconnect structures

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Process for device using partial SOI

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Process for digging a deep trench in a semiconductor body...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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