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Passivation for cleaning a material

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Pattern formation method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Pattern forming method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Patterned product and its manufacturing method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Patterning by energetically-stimulated local removal of...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Patterning by energetically-stimulated local removal of...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Patterning method using a combination of photolithography...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Photonic structures, devices, and methods

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Photoresist removal process using heated solvent vapor

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Plasma etching using polycarbonate mask and low pressure-high de

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Plasma etching using polycarbonate mask and low-pressure...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Plasma method for stripping ion implanted photoresist layers

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is exposed to nonimaging radiation
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Polymer-based micromachining for microfluidic devices

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
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Positive tone bi-layer imprint lithography method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Positive tone bi-layer imprint lithography method

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
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Printing plate and method for fabricating the same

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Process for defining a pattern using an anti-reflective coating

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
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Process for etching bismuth-containing oxide films

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Process for forming resist mask pattern

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Masking of sidewall
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Process for producing a chip using a mold

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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