4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
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Nanoimprint lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
Patent

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Nanolithographic method of forming fine lines

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Nanoscale electric lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Non-photolithographic etch mask for submicron features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Patent

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Non-photolithographic etch mask for submicron features

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Resist material applied in particulate form or spray
Patent

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