Photonic structures, devices, and methods

Details Photonic structures, devices, and methods Photonic structures, devices, and methods

2007-07-06

2009-10-27

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Masking of a substrate using material resistant to an etchant

C216S052000

Reexamination Certificate

active

07608194

ABSTRACT:
Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.

REFERENCES:
patent: 5172267 (1992-12-01), Yablonovitch
patent: 5335240 (1994-08-01), Ho et al.
patent: 5406573 (1995-04-01), Ozbay et al.
patent: 5440421 (1995-08-01), Fan et al.
patent: 5600483 (1997-02-01), Fan et al.
patent: 5651818 (1997-07-01), Milstein et al.
patent: 5772905 (1998-06-01), Chou
patent: 5997795 (1999-12-01), Danforth et al.
patent: 5998298 (1999-12-01), Fleming et al.
patent: 6139626 (2000-10-01), Norris et al.
patent: 6309580 (2001-10-01), Chou
patent: 6358653 (2002-03-01), Turberfield et al.
patent: 6358854 (2002-03-01), Fleming et al.
patent: 6392787 (2002-05-01), Cirelli et al.
patent: 6468823 (2002-10-01), Scherer et al.
patent: 6469682 (2002-10-01), De Maagt et al.
patent: 6482742 (2002-11-01), Chou
patent: 6517995 (2003-02-01), Jacobson et al.
patent: 6518189 (2003-02-01), Chou
patent: 7344903 (2008-03-01), Erchak et al.
patent: 2002/0045136 (2002-04-01), Fritze et al.
patent: 2002/0062782 (2002-05-01), Norris et al.
patent: 2002/0079497 (2002-06-01), Gopinath
patent: 2002/0115002 (2002-08-01), Bailey et al.
patent: 2002/0154403 (2002-10-01), Trotter, Jr.
patent: 2002/0159126 (2002-10-01), Sigalas
patent: 2002/0167118 (2002-11-01), Billiet et al.
patent: 2003/0141507 (2003-07-01), Krames et al.
patent: 2004/0214427 (2004-10-01), Kloster
patent: 2007/0045640 (2007-03-01), Erchak et al.
patent: 2008/0292976 (2008-11-01), Terasaki et al.
patent: 10 729 54 (2001-01-01), None
patent: 2000-258650 (2000-09-01), None
patent: 2000-284136 (2000-10-01), None
patent: 2000-314817 (2000-11-01), None
patent: 2002-323631 (2002-11-01), None
patent: 2002-323632 (2002-11-01), None
Johnson, “Nanolith effort harnesses . . . ” EETimes Aug. 5, 2003 http://www.eetimes.com/story/OEG2003080550035.
Anon. “UV based Nanoimprint Lithography” http://www.amo.de/amica
anoimprint.html (date unknown).
Sreenivasan “Nanoimprint Lithography . . . ” http://www.nnf.cornelledu/JapanUS/SreenivasanJUSSSymposium (date unknown).
Lammers, “Nanoimprint lithography ready . . . ”Dec. 2, 2002 http://www.eetimes.com/at
ews/OEG20021220S0022.
Hewitt, “Moulds cut photonic crystal costs” May 16, 2002 http:/
anotechweb.org/articles
ews/1/5/8/1.
Fleming et al. “All-metallic three-dimensional photonic . . . ” Nature, V. 417 (May 2, 2002), pp. 52-55.
Service “Building Better Photonic Crystals” Science, V. 295 (Mar. 29, 2002) p. 2399.
Frenkel “Playing Tricks with Designer ‘Atoms’” Science, V. 296 (Apr. 5, 2002) pp. 65-66.
Anon.“Si-based photonic . . . ” http//fisicavolta.unipv.it/dipartimento/ricerca/fotonici/ Cofin . . . pdf (date unknown).
Vlasov et al. “On-chip natural assembly of silicon photonic . . . ” Nature V.414 (Nov. 15, 2001) pp. 289-293.
Lin et al.“Silicon Three-dimensional Photonic . . . ” Sandia National Lab report SAND2002-3612 (Nov. 2001).
Gasser et al. “Real-Space Imaging . . . ” Science V. 292 (Apr. 13, 2001) pp. 258-262.
Norris et al. “Chemical Approaches to Three-Dimen . . . ” Adv. Meter., V. 13(6) Mar. 16, 2001 pp. 371-376.
Parker et al. “Photonic Crystals” Aug. 2000 http://physicsweb.org/article/world/13/8/9/1.
Wang et al. “Direct nanoimprint of submicron . . . ” Appl. Phys. Let. V. 75(18) (Nov. 1, 1999) pp. 2767-2769.
Vlasov et al.“Synthesis of Photonic Crystals for Optical . . . ” Adv. Mater, V. 11(2) (1999) pp. 165-169.
Cheng et at. “Controlled growth of hard-sphere colloidal . . . ” Nature, V. 401 (Oct. 28, 1999) pp. 893-895.
Jiang et al. “Single Crystal Colloidal Multilayers . . . ” Chem. Mater., V. 11(Jul. 15, 1999), pp. 2132-2140.
Van Blaaderen et al. “Template-directed colloidal crystalliz . . . ” Nature V. 385 (Jan. 23, 1997) pp. 321-324.
Astratov et al. “Photonic band gaps in 3D ordered . . . ” Phys. Let. A, V. 222 (Nov. 11, 1996) pp. 349-353.
Chou et al. “Imprint Lithography with 25-Nanometer . . . ” Science V. 272 (5258) (Apr. 5, 1996) pp. 85-87.
Chou et al. “Imprint of sub-25 nm vias . . . ” Appl. Phys. Let. V. 67(21) (Nov. 20, 1995) pp. 3114-3116.
McGurn et al.“Photonic band structures of two- . . . ” Phys. Rev. B V. 48(23) Dec. 15, 1993. pp. 17576-17579.
Yablonovitch et al. “Photonic Band Structure: . . . ” Phys. Rev. Let. V. 67(17) Oct. 21, 1991 pp. 2295-2298.
Ho et al. “Existence of a Photonic Gap . . . ” Phys. Rev. Let. V. 65(25) (Dec. 17, 1990) pp. 3152-3155.
Kuramochi et al, “Drilled alternating-layer structure for three-dimensional photonic . . . ”, Jrnl or Vac Sci & Tech, Nov. 2000.
Intl Search Report for Patent Application # PCT/US2004/041861, filed Dec. 14, 2004. Search completed on May 31, 2005.

Affiliated with

Also associated with

Rating

Photonic structures, devices, and methods does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Photonic structures, devices, and methods, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photonic structures, devices, and methods will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4066447