4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
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Imprint method, imprint apparatus, and process for producing...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mechanically forming pattern into a resist
Reexamination Certificate

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In-situ oxidized textured surfaces for prosthetic devices...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Integrated post-etch treatment for a dielectric etch process

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
Reexamination Certificate

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Intermediate layer lithography

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask is multilayer resist
Patent

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