4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
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Textured surface having undercut micro recesses in a surface

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Tunable nanomasks for pattern transfer and nanocluster array...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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