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Thin piece forming method

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Topographical selective patterns

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Topology induced plasma enhancement for etched uniformity improv

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Treatment apparatus control method

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Treatment device, treatment device consumable parts...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Treatment for facilitating bonding between golf ball layers...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Treatment method for surface of photoresist layer and method...

Etching a substrate: processes – Gas phase etching of substrate
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Treatment of etching chambers using activated cleaning gas

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Treatment on silicon oxynitride

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Tunable process for selectively etching oxide using...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Two-stage etching process

Etching a substrate: processes – Gas phase etching of substrate – Etching a multiple layered substrate where the etching...
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Two-stage self-cleaning silicon etch process

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Ultrashort pulse high repetition rate laser system for biologica

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
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Uniform etch system

Etching a substrate: processes – Gas phase etching of substrate
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Use of perfluoroketones as vapor reactor cleaning, etching,...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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UV/halogen treatment for dry oxide etching

Etching a substrate: processes – Gas phase etching of substrate
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Vacuum plasma processor having a chamber with electrodes and...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Vacuum processing apparatus and substrate transfer method

Etching a substrate: processes – Gas phase etching of substrate
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Vacuum processing apparatus and vacuum processing method of...

Etching a substrate: processes – Gas phase etching of substrate
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