Promotion of the adhesion of fluorocarbon films
Protection of dielectric window in inductively coupled...
Pulsed plasma processing method and apparatus
Purged lower liner
Radical generating method, etching method and apparatus for...
Reactive Ion Etching chamber design for flip chip...
Reactive ion etching of alumina/TiC substrates
Real time monitoring of plasma etching process
Recovery of Mo/Si multilayer coated optical substrates
Remote plasma cleaning method for processing chambers
Remote plasma cleaning source having reduced reactivity with...
Removal of post-RIE polymer on Al/Cu metal line
Removal of process residues on the backside of a substrate
Residue removal by CO2 water rinse in conjunction with post...
RF antenna having high temperature, oxidation resistant coating
RF plasma method
RF plasma reactor with hybrid conductor and multi-radius...
Ridge and mesa optical waveguides
Scavenging fluorine in a planar inductively coupled plasma...
Selective etch for uniform metal trace exposure and milling...