Promotion of the adhesion of fluorocarbon films

Protection of dielectric window in inductively coupled...

Pulsed plasma processing method and apparatus

Purged lower liner

Radical generating method, etching method and apparatus for...

Reactive Ion Etching chamber design for flip chip...

Reactive ion etching of alumina/TiC substrates

Real time monitoring of plasma etching process

Recovery of Mo/Si multilayer coated optical substrates

Remote plasma cleaning method for processing chambers

Remote plasma cleaning source having reduced reactivity with...

Removal of post-RIE polymer on Al/Cu metal line

Removal of process residues on the backside of a substrate

Residue removal by CO2 water rinse in conjunction with post...

RF antenna having high temperature, oxidation resistant coating

RF plasma method

RF plasma reactor with hybrid conductor and multi-radius...

Ridge and mesa optical waveguides

Scavenging fluorine in a planar inductively coupled plasma...

Selective etch for uniform metal trace exposure and milling...