RF antenna having high temperature, oxidation resistant coating

Details RF antenna having high temperature, oxidation resistant coating RF antenna having high temperature, oxidation resistant coating

1995-11-02

1998-07-28

Dang, Thi

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

156345, 118723I, 438729, 20419212, 20429808, 20429834, H05H 100

Patent

active

057858780

ABSTRACT:
A high temperature, oxidation resistant coating is provided for an RF antenna used in semiconductor processing. In a preferred embodiment, the coating is made of nickel to protect the antenna against oxidation at high temperatures.

REFERENCES:
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patent: 5531834 (1996-07-01), Ishizuka et al.
patent: 5560776 (1996-10-01), Sugai et al.
patent: 5587226 (1996-12-01), Leung et al.
Annual Book of ASTM Designation B733--90.sup.1.epsilon., pp. 479-484, 1990.
Hawley's Chemical Dictionary, 12th ed./revised by Richard J. Lewis, Sr., p. 930, 1993.
Perry's Chemical Engineers' Handbook, 6th ed., pp. 23-41 and 23-58 to 23-62, 1984.

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