Method to control uniformity using tri-zone showerhead

Method to reduce stacking fault nucleation sites and reduce...

Method to reduce stacking fault nucleation sites and reduce...

Methodologies to reduce process sensitivity to the chamber...

Methodology for in situ etch stop detection and control of plasm

Methods and apparatus for controlling ion energy and plasma...

Methods and apparatus for determining an etch endpoint in a...

Methods and apparatus for etching a nitride layer in a...

Methods and apparatus for etching semiconductor wafers and layer

Methods and apparatus for in situ substrate temperature...

Methods and apparatus for monitoring a process in a plasma...

Methods and apparatus for monitoring a process in a plasma...

Methods and apparatus for processing curved surface

Methods and apparatus for reducing byproduct particle generation

Methods and apparatus for removing photoresist mask defects in a

Methods and apparatus for sequentially alternating among...

Methods and apparatus for the optimization of etch...

Methods and apparatus for the optimization of etch...

Methods and apparatus for tuning a set of plasma processing...

Methods for critical dimension control during plasma etching