Methods and apparatus for processing curved surface

Details Methods and apparatus for processing curved surface Methods and apparatus for processing curved surface

1994-12-12

1995-10-10

Powell, William

Etching a substrate: processes

Gas phase etching of substrate

Application of energy to the gaseous etchant or to the...

156345, H01L 21506, B44C 122, C03C 1500

Patent

active

054567980

ABSTRACT:
In order to perform micromachining of a precision smooth curved surface on a workpiece, light emitted from a mercury lamp is transmitted through a photomask, Fourier transform lens, aperture material, and inverse Fourier transform lens, after which it is beamed upon the workpiece material to be surface-machined and a positive photoresist layer which is formed on the surface of the workpiece material. By means of the foregoing structure, the high-frequency optical components which are included in the light emitted from the mercury lamp and which may cause roughening of curved-surface machining are made to converge at a location away from the optical axis and are removed by means of an aperture provided thereupon, with the only the residual low-frequency optical components being transmitted through the aperture, and so the intensity profile of the light which is beamed upon the positive photoresist layer is smoothed and a smooth-surface curved surface is transcribed to the positive photoresist layer.

REFERENCES:
patent: 5316640 (1994-05-01), Wakabayashi et al.
Shiono, et al: "Reflection micro-Fresnel lenses and their use in an integrated focus sensor", Applied Optics vol. 28, No. 15, Aug. 15, 1989.
Bloomstein, et al: "Laser-Chemical Three-Dimensional Writing of Multimaterial Structures for Microelectromechanics", IEEE, Catalog No. CH2957-Sep. 1991.
1991 Tokai-Section Joint Convention Record of The Six Institutes of Electrical and Related Engineers, Oct. 1992.
JSME Annual Conference on Robotics and Mechatronics 9ROBOMEC'92) - Toward the Realization of Intelligent Machine Systems.
Hisanaga et al, "Fabrication of 3-Dimensionally Shaped Si Diaphragm Dynamic Focusing Mirror", IEEE Proceedings of Micro Electro Mechanical Systems, Feb. 7-10, 1993, pp. 30-35, LC No. 92-56273, IEEE Catalog No. 93CH3265-6.
"An electro-static-force drive type dynamic focusing mirror", an Abstract of a Proceeding of 1992 Tokai-Section Joint Convention Record of the Six Institutes of Electrical and Related Engineers, a symposium regarding micromachine, Oct. 17, 1992, item No. S2-1.

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