Manufacturing method for vibrator

Details Manufacturing method for vibrator Manufacturing method for vibrator

2011-03-08

2011-03-08

Norton, Nadine G (Department: 1713)

Etching a substrate: processes

Gas phase etching of substrate

Reexamination Certificate

active

07901587

ABSTRACT:
After an external shape of a photoresist layer is patterned with use of a Cr film as an underlayer, i.e., a metal film to serve as an anticorrosive film that resists crystal etching, and an Au film as a surface layer, the Au film is etched. After groove portions are then patterned, the Cr film is etched. Since no degenerated-surface layer cannot be formed on the photoresist layer with an etchant for the Au film, the groove portions can be patterned without any degenerated-surface layer according to this method, so that high-accuracy groove portions can be formed.

REFERENCES:
patent: 5137700 (1992-08-01), Sloan
patent: 5-315881 (1993-11-01), None
patent: 2002-076806 (2002-03-01), None
patent: 2002076806 (2002-03-01), None
patent: 2003-347885 (2003-12-01), None
patent: 3543772 (2004-04-01), None
patent: 2004-254173 (2004-09-01), None
Fumitaka et al, JP 2002-076806 Machine Translation.
Osamu, JP 2003-347885 Machine Translation.
Hideaki, JP 2002-261557, Machine Translation.

Affiliated with

Also associated with

Rating

Manufacturing method for vibrator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Manufacturing method for vibrator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Manufacturing method for vibrator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2682005