Micromachined silicon probe for scanning probe microscopy

Micromachined vertical vibrating gyroscope

Micromachining method and micromachined structure

Micromechanical barb and method for making the same

Micromechanical component and method for producing the same

Micromechanical component and method for producing the same

Micromechanical component and production method

Micromechanical component with a dielectric movable structure, m

Micromechanical part and method for its manufacture

Micromirror device and a method of making the same

Microstructure gas valve control forming method

Microstructures and methods of fabrication thereof

Monolithic printhead with self-aligned groove and relative...

Multicomponent nanorods

Multicomponent nanorods

Multilayered circuitized substrate and method of fabrication

Multiple internal seal ring micro-electro-mechanical system...

Nano-size imprinting stamp using spacer technique

Nanometer scale fabrication method to produce thin film nanostru

Nonstick layer for a micromechanical component