Micromirror device and a method of making the same

Details Micromirror device and a method of making the same Micromirror device and a method of making the same

2007-11-16

2010-10-26

Culbert, Roberts (Department: 1716)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

C216S024000, C438S052000

Reexamination Certificate

active

07820063

ABSTRACT:
A reflective and deformable micromirror device comprises a reflective micromirror plate attached to a deformable hinge that is formed on and held by a hinge post on a substrate. The substrate has an addressing electrode formed thereon. A selected dielectric material is disposed between the deformable hinge and the addressing electrode.

REFERENCES:
patent: 5646768 (1997-07-01), Kaeriyama
patent: 2007/0273954 (2007-11-01), Mangrum

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