Microstructures and methods of fabrication thereof

Details Microstructures and methods of fabrication thereof Microstructures and methods of fabrication thereof

2007-02-27

2007-02-27

Hassanzadeh, Parviz (Department: 1763)

Etching a substrate: processes

Etching of semiconductor material to produce an article...

Reexamination Certificate

active

10695591

ABSTRACT:
Microstructures and methods of fabricating microstructures are disclosed. One exemplary microstructure, among others, includes a substrate, an overcoat layer disposed upon the substrate, an air-region within at least a portion of the overcoat layer, and a framing material layer engaging at least a portion of the air-region on the inside of the framing material layer and engaging the overcoat layer on the outside of the framing material layer.

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