Monolithic printhead with self-aligned groove and relative...

Etching a substrate: processes – Etching of semiconductor material to produce an article...

Reexamination Certificate

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C216S027000, C216S041000, C216S057000

Reexamination Certificate

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06887393

ABSTRACT:
A monolithic thermal ink jet printhead (40) comprising a groove (45), a plurality of chambers (74) and nozzles (56) is manufactured by means of steps of: (203, 205) partially etching the groove (45) by means of a “dry” process and a “wet” process; (210) depositing a plurality of sacrificial layers (54); (212) obtaining a plurality of casts (156); (216) completing the etching of the groove (45) by means of an electrochemical process; and (220) removing the casts (156) and the sacrificial layers (54) in such a way as to obtain a plurality of nozzles (56) and chambers (74).

REFERENCES:
patent: 5308442 (1994-05-01), Taub et al.
patent: 5635966 (1997-06-01), Keefe et al.
patent: 5658471 (1997-08-01), Murthy et al.
patent: 6143190 (2000-11-01), Yagi et al.
patent: 0713774 (1996-05-01), None
patent: 0841167 (1998-05-01), None
patent: 0956954 (1999-11-01), None
patent: WO 0103934 (2001-01-01), None

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