Apparatus and method for dummy pattern arrangement

Characterizing thermomechanical properties of an organic...

Correcting 3D effects in phase shifting masks using...

Creating method of photomask pattern data, photomask created...

Data generating method, data generating device, and program...

Design structure for a redundant micro-loop structure for...

Dummy pattern design for reducing device performance drift

Electron beam patterning

Gate modeling for semiconductor fabrication process effects

Hierarchical compression for metal one logic layer

Integrated circuits and methods of design and manufacture...

Intelligent pattern signature based on lithography effects

Mask pattern data generating method, information processing...

Method and system for a pattern layout split

Method for designing mask including forming a mesh dummy...

Method for layout of random via arrays in the presence of...

Method for selectively amending layout patterns

Method for time-evolving rectilinear contours representing...

Method of arranging mask patterns and apparatus using the...

Method of performing mask-writer tuning and optimization