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Thermal processing system

Coating apparatus – Gas or vapor deposition
Patent

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Thermal processing system with improved process gas flow and...

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Thermal processing system with supplemental resistive heater and

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermal processor for semiconductor wafers

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermal reflow method employing microwave energy

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal treatment apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thermal treatment apparatus, semiconductor device fabrication ap

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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Thermal treatment furnace in a system for manufacturing semicond

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermal treatment with enhanced intra-wafer, intra-and inter-bat

Coating apparatus – Gas or vapor deposition
Patent

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Thermal vapor deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermally floating pedestal collar in a chemical vapor depositio

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Thermally zoned substrate holder assembly

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thermally zoned substrate holder assembly

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thermally zoned substrate holder assembly

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Thin film deposition apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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