Thermally zoned substrate holder assembly

Details Thermally zoned substrate holder assembly Thermally zoned substrate holder assembly

2007-12-20

2010-12-14

MacArthur, Sylvia R. (Department: 1716)

Coating apparatus

Gas or vapor deposition

With treating means

C156S345520, C156S345530, C118S725000, C118S728000

Reexamination Certificate

active

07850782

ABSTRACT:
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas- or vacuum-filled chamber).

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