Thermally zoned substrate holder assembly

Details Thermally zoned substrate holder assembly Thermally zoned substrate holder assembly

2008-03-25

2008-03-25

MacArthur, Sylvia R. (Department: 1792)

Coating apparatus

Gas or vapor deposition

With treating means

C392S416000, C156S345520, C156S345530

Reexamination Certificate

active

10721500

ABSTRACT:
A thermally zoned substrate holder including a substantially cylindrical base having top and bottom surfaces configured to support a substrate. A plurality of temperature control elements are disposed within the base. An insulator thermally separates the temperature control elements. The insulator is made from an insulting material having a lower coefficient of thermal conductivity than the base (e.g., a gas-or vacuum-filled chamber).

REFERENCES:
patent: 5078851 (1992-01-01), Nishihata et al.
patent: 5234527 (1993-08-01), Nozawa et al.
patent: 5846375 (1998-12-01), Gilchrist et al.
patent: 5937142 (1999-08-01), Moslehi et al.
patent: 6664738 (2003-12-01), Arai et al.
patent: 6723202 (2004-04-01), Nagaiwa et al.
patent: 6740853 (2004-05-01), Johnson et al.
patent: 6753272 (2004-06-01), Lee et al.
patent: 6847014 (2005-01-01), Benjamin et al.
patent: 6949719 (2005-09-01), Suenaga et al.
patent: 6949722 (2005-09-01), Strang et al.
patent: 2003/0164226 (2003-09-01), Kanno et al.
“Rib” as defined by Answers.com.
“Rib” as defined by Answers.com, date unknown.

Affiliated with

Also associated with

Rating

Thermally zoned substrate holder assembly does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Thermally zoned substrate holder assembly, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermally zoned substrate holder assembly will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3909609