Passive shield for CVD wafer processing which provides frontside

Passive shield for CVD wafer processing which provides frontside

Patterned susceptor to reduce electrostatic force in a CVD chamb

Patterned thin-film deposition using collimating heated...

PCVD apparatus and a method of manufacturing an optical...

PCVD apparatus and method of manufacturing an optical fiber,...

PECVD (plasma enhanced chemical vapor deposition) method for dep

Pedestal with a thermally controlled platen

Pedestal with a thermally controlled platen

Perforated plasma confinement ring in plasma reactors

Perforated shield for plasma immersion ion implantation

Perimeter wafer seal

Phosphorus effusion cell for molecular beam epitaxy

Phosphorus effusion source

Photo chemical reaction apparatus

Photo CVD apparatus having no ultraviolet light window

Photo CVD apparatus with a glow discharge system

Photo-assisted remote plasma apparatus and method

Photo-chemical vapor deposition apparatus

Photo-chemical vapor deposition apparatus having exchange appara